Pourbaix E-pH diagrams therefore consist of several domains representing three possible states: ➢Ĭorrosion where metal attack is thermodynamically possible with formation of soluble or permeable species ➢
State-of the-art electrodes incorporate temperature compensation algorithms into the electrode's control software, with the realization that if the composition of the process changes, the temperature compensation coefficient must also change. These phenomena can explain discrepancies with in-line pH, resistivity, and conductivity measurements. Ionic strength, dissolved CO 2, and interference from other ions in the solution will affect the measured value. Light has studied the effects of temperature on water resistivity, from 0 to 100☌. Furthermore, the pH, resistivity, and conductivity of an aqueous solution change with temperature, because of the effect of temperature on the dissociation of weak acids and bases and the dissociation of water. Thus, for semiconductor applications, where processing temperatures can deviate from the standard 25☌, a compensation factor must be included to obtain the correct value for the concentration.
The Nernst equation (Eq 11.4-13) shows that the potential is dependent on temperature thus a small temperature change, such as 1☌, can have an effect, typically 2%, on the electrode potential. Reinhardt, in Handbook of Silicon Wafer Cleaning Technology (Third Edition), 2018 11.4.3.1 Effect of Temperature on Electrode Measurements
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